Authors
Citation
T. Kitajima et al., THE TIME-RESOLVED 2-DIMENSIONAL PROFILE OF A RADIOFREQUENCY CAPACITIVELY COUPLED PLASMA, Journal of physics. D, Applied physics, 30(12), 1997, pp. 1783-1789
Citations number
19
Categorie Soggetti
Physics, Applied
Journal title
ISSN journal
00223727
Volume
30
Issue
12
Year of publication
1997
Pages
1783 - 1789
Database
ISI
SICI code
0022-3727(1997)30:12<1783:TT2POA>2.0.ZU;2-1
Abstract
The temporal characteristics of 2D spatial images of the net excitatio
n rate of argon 3p(5) in a low-pressure capacitively coupled plasma (C
CP) reactor driven at high frequency (13.56 MHz) are investigated by c
omputer-assisted optical emission tomography for pressures ranging fro
m 10 mTorr to 1.0 Torr. The radial uniformity and sustaining mechanism
of the CCP are discussed on the basis of the absolute net excitation
rate of Ar(3p(5)) in Ar for 13.56 MHz.