The equations are derived for the determination of the components of the sm
all deformation tensor in the free space and in the image field. These gene
ral equations are used for the case of the in-plane rotation (rotation abou
t an axis lying in the object surface plane) and the normal rotation (rotat
ion about a normal to the object surface plane). The analysis of sensitivit
y and accuracy is done in Chapter 5. Some experimental configurations and r
esults are also presented.