An advanced micromachined fermentation monitoring device

This paper describes the design and fabrication of a novel sensor for the m onitoring of fermentation processes, e.g. the time-resolved amount of livin g cells in fluids, The device consists of two comb-electrodes patterned on a freestanding membrane. The novelty of this device is the capability to cl ean it ultrasonically on chip, i.e. by electrostatic excitation of the memb rane on which the electrodes are placed. (C) 2000 Elsevier Science S.A. All rights reserved.