The effect of dopants on the texture formation in MBE-grown polysilicon films

Authors
Gracheva, TA Malygin, ND Shengurov, DV Shengurov, VG
Citation
Ta. Gracheva et al., The effect of dopants on the texture formation in MBE-grown polysilicon films, TECH PHYS, 45(9), 2000, pp. 1212-1213
Citations number
6
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science
Journal title
TECHNICAL PHYSICS
ISSN journal
10637842 → ACNP
Volume
45
Issue
9
Year of publication
2000
Pages
1212 - 1213
Database
ISI
SICI code
1063-7842(2000)45:9<1212:TEODOT>2.0.ZU;2-O
Abstract
The texture of polysilicon films as a function of doping impurities and gro wth temperature was studied. (C) 2000 MAIK "Nauka/Interperiodica".