In a wide temperature range (500-20 K), we studied the electrical transport
mechanism in intrinsic and P-doped nanocrystalline silicon films. We find
that the HQD model successfully explains the conductivity at high temperatu
res (500-200K), but fails at temperature below 200K. Single activation ener
gy TY was found in the low temperature range (100-20K), which is approximat
ely equal to the value of k(B)T(W similar to 1-3k(B)T). It is in good agree
ment with the characteristics of hopping conduction in amorphous semiconduc
tor, In this paper we modified the HQD model. We consider two distinct tran
sport mechanisms, thermal-assisted tunneling and electrons hopping through
the local states near the Fermi level exist simultaneously. At high tempera
ture tunneling transport is the main process. At low temperature transport
is governed by electron hopping. On this basis, a complete analytic functio
n of the conductivity is proposed. The function successfully explains the c
onductivity of intrinsic and P-doped nanocrystalline silicon films in the w
hole temperature range.