Fabrication of nanometer-scale patterns by ion-milling with porous anodic alumina masks

Authors
Almawlawi, D Bosnick, KA Osika, A Moskovits, M
Citation
D. Almawlawi et al., Fabrication of nanometer-scale patterns by ion-milling with porous anodic alumina masks, ADVAN MATER, 12(17), 2000, pp. 1252
Citations number
65
Categorie Soggetti
Multidisciplinary,"Material Science & Engineering
Journal title
ADVANCED MATERIALS
ISSN journal
09359648 → ACNP
Volume
12
Issue
17
Year of publication
2000
Database
ISI
SICI code
0935-9648(20000901)12:17<1252:FONPBI>2.0.ZU;2-4
Abstract
The use of porous anodic alumina as a contact mask for ion-milling is demon strated here to produce highly regular periodic arrays of nano-holes or bos ses in an aluminum surface. The interaction of the molten aluminum with the alumina can be either wetting or non-wetting, according to the temperature of the melt, resulting in the formation of bosses (see Figure) or holes.