To develop planar microchemical pCO(2) sensing devices with improved electr
ochemical properties, we combined two advanced technologies. One is a diffe
rential sensor arrangement to simplify the microfabrication procedure by em
ploying pH-sensitive gas-permeable membranes, and the other is the use of a
n enzyme (carbonic anhydrase) to shorten total measurement time by accelera
ting the rate of CO2 hydration. The adhesion of the polyurethane-matrix gas
-permeable membrane is enhanced significantly by incorporating a silanizing
reagent (silicon tetrachloride), improving the stability and extending sen
sor lifetime. The proposed differential pCO(2) microelectrodes exhibited si
gnificantly improved performance in their preconditioning period, response
and recovery times, stability, response slope, and lifetime.