Standard thermodynamic functions of nine possible both neutral and single c
harged products of thermal decomposition of SF6 were computed by the method
of direct summation and tabulated in form of approximation coefficients up
to 20000 K. Obtained results were discussed and compared with the existing
literature data. Furthermore, influence of excited electronic states was b
riefly studied. Finally, the equilibrium composition was performed in the c
ase of the decomposition of pure SF6 using the calculated data.