Texture of Ti-Ni rolled thin plates and sputter-deposited thin films

Ti-Ni alloy thin plates and thin films were made by the rolling method and r.f. sputter-deposition technique, respectively. In order to apply these Ti -Ni shape memory alloy thin plates and thin films for microactuators, it is very important to know the crystallographic texture and clarify the planar anisotropy in shape memory strain. The texture was investigated by X-ray d iffraction and crystallite orientation distribution functions (ODF) were me asured. The rolled thin plates revealed a specific deformation or recrystal lization texture depending on annealing temperature, while the thin films s howed a uniform crystallite orientation distribution or a typical [110] fib er texture depending on sputtering condition. The transformation strain dep ended on direction on the specimen plane of the rolled thin plates, while i t was almost the same irrespective of direction in the sputter-deposited th in films. (C) 2000 Elsevier Science Ltd. All rights reserved.