Modelling, control and simulation of an IC wafer fabrication system: a generalized stochastic coloured timed Petri Net approach

This study presents a generalized stochastic coloured timed Petri net( GSCT PN) to model an IC wafer fabrication system. According to the GSCTPN, it mo dels the dynamic behaviours of the IC fabrication system, such as loading, reentrant processing, unloading and machine failure. Furthermore, modular a nd synthesis techniques are used to construct a large and complex system mo del. The two major sub-models are the Process-Flow Model and the Transporta tion Model. The Transportation Model incorporates a simple motion-planning rule and a collision avoidance strategy to solve the variable speed and tra ffic jam problems of vehicles. This work also describes a simulation based performance analysis and schedule adjustment. To demonstrate the promise of the proposed work, this study makes actual Taiwanese IC wafer fabrication systems the target plant layout for implementation.