Eley-Rideal reaction of O+ with oxidized Si(100)

The reaction of 10-60 eV O+ ions with a silicon oxide thin film produces sc attered O-2(-). Isotopic labeling experiments demonstrate that the O-2(-) p roduct is formed by an abstraction reaction and not by physical sputtering. Energy and angle resolved detection reveals a correlation between the scat tered and incident particle momenta, indicative of a direct process in whic h the incoming oxygen atom reacts with an adsorbed oxygen atom through an E ley-Rideal mechanism. (C) 2000 American Institute of Physics. [S0021-9606(0 0)70737-9].