D. Tian et al., A method of distinguishing the level of features in projected x-ray images: application to multilayer printed circuit boards, MEAS SCI T, 11(9), 2000, pp. 1364-1368
An image in an x-ray microscope is a projected image that includes all info
rmation throughout the thickness of the object being exposed. This results
in a loss of level information from the different layers. In this work, a m
ethod has been developed to distinguish the level of metal layers in multil
ayer printed circuit boards (PCBs) without measurement coupons, and by the
use of x-ray microscopy. To distinguish the levels of two metal layers, an
indicator point was first defined on the edge of each layer and used for id
entifying the layer it belonged to. The sample was then moved parallel to t
he connecting line of the two indicator points. During the movement. the ch
ange trend in the projected distance between the indicator points was evalu
ated visually or by using a ruler or an image analyser. If the projected di
stance increases, the leading point is on the upper layer and the trailing
point on the lower one. If the projected distance decreases, the leading po
int is on the lower layer, while the trailing point is on the upper one. Fo
r a layer structure with more than two layers, the level order can be deter
mined by comparing each layer pair.