Amorphous films of the Fe-Zr alloy prepared by ion beam assisted deposition

Citation
M. Ding et al., Amorphous films of the Fe-Zr alloy prepared by ion beam assisted deposition, NUCL INST B, 170(1-2), 2000, pp. 79-84
Citations number
20
Categorie Soggetti
Spectroscopy /Instrumentation/Analytical Sciences","Instrumentation & Measurement
Journal title
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
ISSN journal
0168583X → ACNP
Volume
170
Issue
1-2
Year of publication
2000
Pages
79 - 84
Database
ISI
SICI code
0168-583X(200009)170:1-2<79:AFOTFA>2.0.ZU;2-8
Abstract
The possibility of the amorphous alloy forming in Fe/Zr multilayered thin f ilms was studied by Ar+ ion beam assisted deposition (IBAD). The Ar+ ion en ergy used was from 4 to 12 keV. Several amorphous alloys were obtained in Z r-rich films. A crystal-amorphous-fcc phase-amorphous-crystal phase transfo rmation was also observed in Fe19Zr81 films during IBAD experiment. The exp erimental results suggested a critical thickness of individual Fe layer ove r which Fe/Zr multilayered films could not be full amorphized by the IBAD m ethod. The amorphous layer at interface was responsible for the formation o f Fe-Zr alloy in the multilayers. (C) 2000 Elsevier Science B.V. All rights reserved.