The possibility of the amorphous alloy forming in Fe/Zr multilayered thin f
ilms was studied by Ar+ ion beam assisted deposition (IBAD). The Ar+ ion en
ergy used was from 4 to 12 keV. Several amorphous alloys were obtained in Z
r-rich films. A crystal-amorphous-fcc phase-amorphous-crystal phase transfo
rmation was also observed in Fe19Zr81 films during IBAD experiment. The exp
erimental results suggested a critical thickness of individual Fe layer ove
r which Fe/Zr multilayered films could not be full amorphized by the IBAD m
ethod. The amorphous layer at interface was responsible for the formation o
f Fe-Zr alloy in the multilayers. (C) 2000 Elsevier Science B.V. All rights
reserved.