Effects of Ne+ and Ar+ ion bombardment on Fe/SiO2 bi-layers studied using RBS

Ion beam mixing of Fe with SiO2 has been studied in details, using Rutherfo rd backscattering spectroscopy (RBS) technique. Fe thin films of different thicknesses ranging from 23 to 49 nm were deposited on SiO2 by thermal evap oration method. Specimens were irradiated with Ne+ and Ar+ ions at differen t fluences (ranging from 5 x 10(15) to 2 x 10(17) ions/cm(2)) and at differ ent temperatures (RT, 423 and 573 K. It is found that the square of diffusi on length is proportional to the ion fluence implying that mixing is due to ballistic effects when irradiated with Ne+, and Ar+ ions. Long-range diffu sional type of mixing similar to that observed in Fe/Si system is insignifi cant in case of Fe/SiO2 system. As the temperature is increased, keeping ot her parameters same (the ion mass, fluence and F-d), there is minor increas e in the diffusion length. (C) 2000 Elsevier Science B.V. All rights reserv ed.