Catalytic activity of sputtered palladium films for electroless nickel plating studied using a quartz crystal microbalance

The catalytic activity of palladium films sputtered on a quartz resonator w as studied using a nickel bath in which a quartz crystal microbalance was u sed to determine electroless plating processes. An adhesive interface betwe en the Pd layer and the quartz surface influenced activity. A chromium unde rlayer suppressed the catalytic activity of Pd film, but a gold underlayer did not. A palladium layer formed on Au a layer operated as a catalyst. The catalytic activity of Pd film on the Cr underlayer was greatly enhanced by cathodic treatment in dilute hydrochloric acid.