The inelastic mean free path of electrons near solid surfaces is a key para
meter in quantitative analyses by commonly used surface-sensitive methods.
There are experimental and theoretical methods to determine reliable inelas
tic mean free path values. The elastic peak electron spectroscopy method al
lows the determination of the inelastic mean free path values in agreement
with the ASTM definition. This method is based on a theoretical relationshi
p between elastic backscattering probability and the inelastic mean free pa
th.
In the present contribution, we study statistical and systematic uncertaint
ies of the measured backscattered intensities from Ni foils prepared by rol
ling and cutting of the bulk material and of annealing, Depending on the sa
mple preparation, the measured intensities vary by a factor of 2 for 200 eV
electron energy, whereas at >1000 eV the deviations are much smaller. This
behaviour, explained by the different surface morphology and different gra
in sizes, has an important impact on measured inelastic mean free path valu
es. Investigation of Ni foils is of a great interest due to frequent use of
this metal as a standard material in the elastic peak electron spectroscop
y method. Copyright (C) 2000 John Wiley & Sons, Ltd.