Atomic structure of steps on Si(113) surfaces studied by direct HRTEM observation

Atomic steps of Si(113) reconstructed surfaces were observed by ultrahigh v acuum field emission transmission electron microscopy (UHV-FE-TEM). The pro file images in high-resolution transmission electron microscopy (HRTEM) all owed us to investigate the cross-sectional atomic structure of Si(113) 3 x 1 and 3 x 2 surfaces and their steps. It was found that the atomic structur e near the step edges shows anomalous reconstruction, which is different fr om the 3 x 1 and 3 x 2 structure and independent of whether the terrace sur face structure is 3 x 1 or 3 x 2, A higher index surface that appeared near the (113) surface was identified to he the (337) surface. It was deduced t hat the (337) surface is characteristic of the stepped (113) surface. Copyr ight (C) 2000 John Wiley & Sons, Ltd.