Photoelectron signal simulation from textured overlayer samples

In this paper we propose a mathematical model for calculating XPS intensity distribution from a textured sample surface covered with a thin film. The surface roughness is approximated using triangular prisms, Analytical expre ssions for XPS intensity calculation are given. The results show that the X PS signals vary significantly in the cases of thin overlayers and high valu es of the prism slope angle. This model is useful when evaluating the surfa ce roughness together with the film thickness, Copyright (C) 2000 John Wile y & Sons, Ltd.