Authors
Citation
M. Setton et S. Del Medico, Dry etching for DAMASCENE technology, VIDE, 55(295), 2000, pp. 30-37
Citations number
3
Categorie Soggetti
Material Science & Engineering
Journal title
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS
ISSN journal
12660167
→ ACNP
Volume
55
Issue
295
Year of publication
2000
Pages
30 - 37
Database
ISI
SICI code
1266-0167(2000)55:295<30:DEFDT>2.0.ZU;2-8