SIMS: a capable method for BCN quantification

Obvious matrix effects often inhibit major component analysis carried out w ith secondary ion mass spectrometry (SIMS). Although MCs+ secondary ions (M represents the element to be analyzed) are: used - already know as matrix independent for some compounds - feasibility of SIMS quantification has sep arately be validated for each new system. For the ternary system consisting of boron, carbon and nitrogen (BCN), all features possibly influences quan tification, i.e. uniqueness of detected secondary ion signals, charge effec ts, altering measurement conditions, reproducibility or matrix effects are investigated and taken into account. The results indicate that an accurate quantification applying SIMS for major component analysis is possible for t his system. Furthermore, deviations between SIMS results and real compositi ons are determined. (C) 2000 Published by Elsevier Science B.V.