Ge dots grown by molecular beam epitaxy on Si(100) substrates and subsequen
tly capped with a IO-nm thick epitaxial Si layer were investigated by means
of in-situ scanning tunneling microscopy (STM), scanning tunneling spectro
scopy (STS) and ballistic electron emission microscopy (BEEM). At the well-
ordered and mostly flat Si surface, protrusions up to 0.35 nm in height wer
e found at a density equal to the island density before capping. Additional
ly, holes caused by a directed Si diffusion away from highly strained regio
ns could be observed. The lateral in-plane strain was determined from the e
lastic deformations measured by STM. Due to this inhomogeneous strain a cha
nge of the electronic surface structure occurs, resulting in a lowering of
the surface band-gap on top of the buried islands. It was also possible to
detect the buried islands by BEEM even though no more protrusions could be
found on the surface of an additionally deposited CoSi2 film. (C) 2000 Else
vier Science B.V. All rights reserved.