Pl. Guzzo et Jdb. De Mello, Effect of crystal orientation on lapping and polishing processes of natural quartz, IEEE ULTRAS, 47(5), 2000, pp. 1217-1227
Citations number
24
Categorie Soggetti
Optics & Acoustics
Journal title
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL
Lapping and polishing processes of natural quartz; are investigated in rela
tion to crystallographic orientation and applied normal stress. Weight loss
measurements and surface profilometry were carried out in X-, Y-, Z-, and
AT-cut samples. The relationship found between material removal rate and st
ress depends on specimen orientation. Based on indentation fracture mechani
cs, this behavior is discussed in relation to fracture toughness and scratc
h hardness anisotropy of quartz crystals. Scanning electron microscopy (SEM
) shows that brittle microcracking is the primary mechanism involved with m
aterial removal in the lapping process. Plastic deformation mechanisms begi
n to operate on lapped and polished surfaces above a certain Value of stres
s. Surface profiles and SEM micrographs show that the roughness of lapped s
urfaces decreases with increasing normal stress, but an opposite behavior i
s observed in polished surfaces.