We have investigated the aluminum nitride microtubes made of aluminum nitri
de thin film. Aluminum nitride thin film deposited on aluminum foil forms m
icrotubes of itself at room temperature when the aluminum foil is dissolved
in hydrochloric acid solution. The aluminum nitride microtubes exhibit a l
arge bending stress of 1100 +/- 94 megapascals. The bending stress is more
than three times larger than the bending strength of aluminum nitride bulk.
The diameter of the microtubes is proportional to the film thickness. The
bending stress is independent of the film thickness and is fixed. (C) 2000
American Institute of Physics. [S0021-8979(00)01720-5].