Advanced sensor technology based on oxide thin film - MEMS integration

Many of the most significant advances in achieving improved sensor performa nce have been tied to the integration of thin film oxides with micromachine d and microelectronic technologies (MEMS). Arrays of microcantilever beams or microhotplates show great promise as chemical sensor platforms exhibitin g enhanced selectivity and markedly reduced power dissipation. Microcantile ver beams demonstrate exceptional sensitivity to chemical, thermal and othe r physical stimuli. Microhotplates, provide the opportunity to discriminate between chemical species by control of reaction rates. We review recent ke y developments in the micromachining of suitable structures, the means for incorporating active oxide films and the performance of individual and arra ys of sensor devices.