Many of the most significant advances in achieving improved sensor performa
nce have been tied to the integration of thin film oxides with micromachine
d and microelectronic technologies (MEMS). Arrays of microcantilever beams
or microhotplates show great promise as chemical sensor platforms exhibitin
g enhanced selectivity and markedly reduced power dissipation. Microcantile
ver beams demonstrate exceptional sensitivity to chemical, thermal and othe
r physical stimuli. Microhotplates, provide the opportunity to discriminate
between chemical species by control of reaction rates. We review recent ke
y developments in the micromachining of suitable structures, the means for
incorporating active oxide films and the performance of individual and arra
ys of sensor devices.