Calculation of electrostatic forces and torques in MEMS using path-independent integrals

Surface- or path-independent integrals based on the Maxwell stress tensor c an be used to compute the forces and torques on micromachined electrostatic devices. The connection of these integrals with charge concentration near the edge of thin plate-like devices (combdrives) is discussed. To illustrat e the use of these path-independent integrals, the force acting on a period ic array of asymmetric combdrives is evaluated.