Because of the growing interest toward the InGaP/GaAs heterostructure and i
ts related Al-free devices development, the difficulties in obtaining the b
est electronic properties have to be well known. Here, structural, optical
and electrical investigations of InxGa1-x layers grown with different MOVPE
machines have been employed to give evidence that uniformity of the crysta
lline quality, morphology, optical and transport properties are strongly af
fected by (i) lattice matching, (ii) gas phase fluid-dynamics, (iii) superl
attice ordering. (C) 2000 Elsevier Science S.A. All rights reserved.