Plastic microoptical interconnection modules for parallel free-space inter- and intra-MCM data communication

We design and fabricate a prototype scalable multichannel free- space inter connection module with the potential for Tb/s-cm(2) aggregate bit-rate capa city over inter - and intra-MCM interconnection distances. The component is fabricated in a high quality optical plastic, PMMA, using deep proton lith ography, an ion-based rapid prototyping technology. As a feasibility demons tration, data communication is achieved at 622 Mb/s per channel with a bit error rate smaller than 10(-13) for 16 channels with an interchannel crosst alk lower than -22 dB. We perform a sensitivity analysis for misalignments and fabrication errors and study the fabrication issues of these components with injection molding techniques. Finally, we provide evidence that these modules can be mass fabricated with the required precision.