A new type of silicon dew point detector is presented in this paper. The fa
bricated detector structures contain a thermometer. two heaters, a capaciti
ve interdigitated sensor for the detection of water, sub-cooled water, as w
ell as ice. The test results of sub-cooled water recognition are carefully
described. The theoretical model of the capacitive interdigitated sensor de
scribing the principle of detection is also discussed. (C) 2000 Elsevier Sc
ience S.A. All rights reserved.