Planar Hall effect in the vertical Hall sensor

The planar Hall effect is theoretically and experimentally studied in the v ertical Hall sensor (VHS). Compared to silicon plate-shaped devices where e xperimental and theoretical value correspond well, the experimental value f or the vertical Hall device is about 10 times smaller than theory predicts. This fact is explained by anisotropy effects and by the unique self-compen sating structure of the device. Thus, magnetic field transducers built with devices of this structure are particularly adapted to the measurement of m agnetic fields with more than one component. (C) 2000 Elsevier Science S.A. All rights reserved.