Precise cross-sectioning for SEM/TEM sample preparation

Citation
Ga. Shechter et al., Precise cross-sectioning for SEM/TEM sample preparation, SOL ST TECH, 2000, pp. S1
Citations number
6
Categorie Soggetti
Eletrical & Eletronics Engineeing
Journal title
SOLID STATE TECHNOLOGY
ISSN journal
0038111X → ACNP
Year of publication
2000
Supplement
S
Database
ISI
SICI code
0038-111X(200009):<S1:PCFSSP>2.0.ZU;2-Q
Abstract
Failure analysis laboratories in manufacturing facilities face an increasin g demand for data that will enable them to improve production performance a nd enhance process yield. This demand requires the labs to produce repeatab le data and measurements quickly. Short turnaround times will reveal failur es on the production floor sooner, saving time, money, and the company's re putation. This article will present existing methodologies for precise SEM/ TEM sample preparation for failure analysis and introduce a new tool, which , with automation and control, makes these demanding tasks possible.