Failure analysis laboratories in manufacturing facilities face an increasin
g demand for data that will enable them to improve production performance a
nd enhance process yield. This demand requires the labs to produce repeatab
le data and measurements quickly. Short turnaround times will reveal failur
es on the production floor sooner, saving time, money, and the company's re
putation. This article will present existing methodologies for precise SEM/
TEM sample preparation for failure analysis and introduce a new tool, which
, with automation and control, makes these demanding tasks possible.