P. Castrucci et al., Near edge X-ray absorption and X-ray photoelectron diffraction studies of the structural environment of Ge-Si systems, SURF REV L, 7(3), 2000, pp. 307-331
Near edge X-ray absorption spectroscopy (XAS), X-ray photoelectron diffract
ion (XPD) and Auger electron diffraction (AED) are powerful techniques for
the qualitative study of the structural and electronic properties of severa
l systems. The recent development of a multiple scattering approach to simu
lating experimental spectra opened a friendly way to the study of structura
l environments of solids and surfaces. This article reviews recent X-ray ab
sorption experiments using synchrotron radiation which were performed at Ge
L edges and core level electron diffraction measurements obtained using a
traditional X-ray source from Ge core levels for ultrathin Ge films deposit
ed on silicon substrates. Thermodynamics and surface reconstruction have be
en found to play a crucial role in the first stages of Ge growth on Si(001)
and Si(111) surfaces. Both techniques show the occurrence of intermixing p
rocesses even for room-temperature-grown Ge/Si(001) samples and give a stra
ightforward measurement of the overlayer tetragonal distortion. The effects
of Sb as a surfactant on the Ge/Si(001) interface have also been investiga
ted. In this case, evidence of layer-by-layer growth of the fully strained
Ge overlayer with a reduced intermixing is obtained when one monolayer of S
b is predeposited on the surface.