SiNx-submicrometer coatings: Optimization of film properties

Authors
Tikana, L Pohl, M Zosch, A Zahn, W Wuttke, W
Citation
L. Tikana et al., SiNx-submicrometer coatings: Optimization of film properties, ADV ENG MAT, 2(1-2), 2000, pp. 53-56
Citations number
3
Categorie Soggetti
Material Science & Engineering
Journal title
ADVANCED ENGINEERING MATERIALS
ISSN journal
14381656 → ACNP
Volume
2
Issue
1-2
Year of publication
2000
Pages
53 - 56
Database
ISI
SICI code
1438-1656(200002)2:1-2<53:SCOOFP>2.0.ZU;2-Y