Nanoindentation hardness of particles used in magnetorheological finishing(MRF)

Knowledge of the hardness of abrasive particles that are used in polishing is a key to the fundamental understanding of the mechanisms of material rem oval. The magnetorheological-finishing process uses both magnetic and nonma gnetic abrasive particles during polishing. The nanohardnesses of the micro meter-sized magnetic carbonyl iron and nonmagnetic abrasive particles have been measured successfully by use of novel, to our knowledge, sample-prepar ation and nanoindentation techniques. Some of the results reported compare favorably with existing microhardness data found in the Literature, whereas other results are new. (C) 2000 Optical Society of America OCIS codes: 220 .5450, 220.4000, 240.5770.