J. Nishio et al., CHARACTERIZATION OF INGAN MULTIQUANTUM-WELL STRUCTURES FOR BLUE SEMICONDUCTOR-LASER DIODES, Applied physics letters, 70(25), 1997, pp. 3431-3433
In0.15Ga0.85N/GaN and In0.15Ga0.85N/In0.05Ga0.95N multi quantum well (
MQW) structures grown on (0001) sapphire substrates were investigated
by high-resolution x-ray diffraction and cross-sectional transmission
electron microscopy. The results show that ultrathin MQWs with fairly
good crystallinity and precisely controlled clear parallel interfaces
were grown. Laser diode structures with MQWs were also studied, and th
e results suggest that these superlattice structures retain their high
quality even after being subjected to high temperatures during the su
bsequent growth of p-type GaN as the optical guiding layer, p-type GaA
lN as the cladding layer, and p-type GaN as the contact layer. (C) 199
7 American Institute of Physics.