Structural characterisation of Ni clusters in AlN via X-ray absorption, X-ray diffraction and transmission electron microscopy

Ni ions were implanted in bulk AlN with the goal to form embedded metallic clusters. Combining several characterisation techniques such as X-ray absor ption spectroscopy, X-ray diffraction and high resolution transmission elec tron microscopy, we determined the lattice parameter of the Ni clusters tha t display a fee crystalline structure. The average size increases when the ion fluence is increased or after a thermal treatment. Thanks to moire frin ges observed by high resolution transmission electron microscopy and to sat ellite peaks seen on the diffraction patterns, we concluded that the anneal ed Ni clusters orientate their (002) planes on the (101) of AIN. Moreover, the satellite positions allowed us to calculate Ni cluster average diameter s, that are in agreement with average sizes deduced by X-ray absorption spe ctroscopy.