Ae. Skorodumov et al., Use of optical emission spectroscopy for determining the number concentration of chlorine atoms in a chlorine-oxygen plasma, HIGH ENERG, 34(5), 2000, pp. 331-333
Applicability of the emission spectroscopy technique in calculating the con
centration of chlorine atoms in a chlorine-oxygen plasma was shown by compa
ring experimental and calculated relative intensities of the 452.62-nm chlo
rine line (5P(2)p(3/2)(0) --> 4s(2)p(3/2) transition, excitation potential
E = 11.94 eV). The number concentration of chlorine atoms found by calibrat
ion with pure gases using this emission line was compared with the one meas
ured by absorption spectroscopy. Some discrepancy between the results at an
oxygen content greater than 50% in the mixture is due to the presence of o
xygen compounds of chlorine which are detected as chlorine atoms by the abs
orption spectroscopy.