A cutoff frequency, f(T), of 85 GHz was measured on a fully-depleted silico
n-on-insulator (FDSOI) n-MOSFET with a gate length of 0.15 mu m. The p-MOSF
ET with 0.22-mu m gate length has an f(T) of 42 GHz. The high-frequency equ
ivalent circuits were derived from scattering parameters for MOSFETs with v
arious gate lengths. The effects of gate Length and other device parameters
on the performance of FDSOI MOSFETs at RF are discussed.