Preparation of PbTiO3 thin films using a coating photolysis process with ArF excimer laser

TiO2, PbO and PbTiO3 thin films were prepared using the Titanium-2-ethylhex anolate and lead-2-ethylhexanoate coating photolysis process with ArF excim er laser irradiation. The photolysis of Ti-2-ethylhexanolale, Pb-2-ethylhex anoate and mixed Ti-2-ethylhexanolate and Pb-2-ethylhexanoate was investiga ted by Fourier transform infrared (FT-IR) absorption spectroscopy and X-ray diffraction (XRD). In the case of the one-step ArF irradiation method at 5 0 mJ/cm(2) with a repetition rate of 10 nz for 5 min, rutile TiO2 and PbTiO 3 perovskite phase along with a pyrochlore phase were obtained, while PbO w as not obtained. On the other hand, in the case of the two-step ArF irradia tion method consisting of preliminary weak irradiation at 10 mJ/cm(2) with a repetition rate of 50 Hz for 0.5 min and a stronger irradiation at 50 mJ/ cm2 with a repetition rate of 10 Wt for 5 min, anatase TiO2, beta-PbO and a single phase of perovskite PbTiO3 were successfully obtained. The crystall ization mechanism of PbTiO3 films from the metallorganic precursor is also discussed.