Experimental results in a low temperature, low power density rf plasma reac
tor show that C2F6 can be decomposed by plasma reaction with oxygen, but CF
4, an undesirable byproduct, is produced. Previously, it had been shown in
a high temperature, high power density microwave reactor that C2F6 can be d
ecomposed without CF4 formation. Calculations show that low temperature neu
tral species kinetics favor the formation of CF4 over COF2, while the oppos
ite is true at high temperature. Further, a high degree of feedstock dissoc
iation such as that observed in high density plasma reactors is predicted t
o lead to very little CF4 formation. Calculations show that adding hydrogen
, water, or hydrocarbons to the C2F6+O-2 mixture should reduce the power ne
cessary for abatement, and will reduce CF4 formation. Hydrogen is predicted
to getter atomic fluorine to form thermodynamically stable HF, and thus pr
event perfluorocompound reformation. (C) 2000 American Vacuum Society.