Chemical structure change of thin films prepared from nonpolymeric organiccompounds by pulsed laser deposition

Authors
Kajitani, T Tanaka, O Tange, Y Matsuda, H Ooie, T Yano, T Yoneda, M Katsumura, M Suzaki, Y
Citation
T. Kajitani et al., Chemical structure change of thin films prepared from nonpolymeric organiccompounds by pulsed laser deposition, J VAC SCI A, 18(5), 2000, pp. 2359-2362
Citations number
13
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
18
Issue
5
Year of publication
2000
Pages
2359 - 2362
Database
ISI
SICI code
0734-2101(200009/10)18:5<2359:CSCOTF>2.0.ZU;2-V
Abstract
Thin films from six kinds of nonlinear optical nonpolymeric organic compoun ds were prepared by pulsed laser deposition (PLD) using a KrF excimer laser (248 nm) at various fluences up to 50 mJ/cm(2). Changes in the chemical st ructure of the films with changes in fluence were studied. The experimental results show that for every compound at least minor decomposition has alre ady started at the threshold fluence for deposition. More serious degradati on occurs with increasing fluences, and little of the original chemical str ucture remains in films prepared by PLD at a fluence of 50 mJ/cm(2). (C) 20 00 American Vacuum Society. [S0734-2101(00)08505-5].