Recommended practice for calibrating vacuum gauges of the thermal conductivity type

This article describes and recommends various methods for calibration of th ermal conductivity vacuum gauges in the pressure range of the order of 10(- 1) Pa ( 10(-3) Torr) to an atmosphere and is one of a series published by t he American Vacuum Society. It contains data from many sources and represen ts the opinions of a number of experts in the field. The text was developed by a sub-committee of the Recommended Practice Committee of the American V acuum Society. The Thermal Conductivity Gauging Committee is made up of use rs and manufacturers of vacuum gauges who have a variety of experience in t he practical use of thermal conductivity gauges. (C) 2000 American Vacuum S ociety. [S0734-2101(00)01505-0].