We have investigated the crystallization of amorphous Y-Ba-Cu-O films with
pulsed laser irradiation. The Y-Ba-Cu-O films were prepared on Si (001) sub
strates by pulsed laser deposition at room temperature. The microstructure
and surface morphology of the films during the crystallization process were
studied by x-ray diffraction and scanning electron microscopy. Micro or su
bmicro Y-Ba-Cu-O crystalline particles can be obtained with variant laser p
ulses and energy densities. The particles have half-spherical or even spher
ical shapes on the film surfaces, and the saturated particle sizes were fou
nd to be determined by the film thickness. (C) 2000 American Vacuum Society
. [S0734-2101(00)04705-9].