Kinematic sample mounting system for accurate positioning of transferrablesamples

Authors
Lapicki, A Boyd, KJ Anderson, SL
Citation
A. Lapicki et al., Kinematic sample mounting system for accurate positioning of transferrablesamples, J VAC SCI A, 18(5), 2000, pp. 2603-2605
Citations number
1
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS
ISSN journal
07342101 → ACNP
Volume
18
Issue
5
Year of publication
2000
Pages
2603 - 2605
Database
ISI
SICI code
0734-2101(200009/10)18:5<2603:KSMSFA>2.0.ZU;2-B
Abstract
A design is reported for a system of transferrable sample holders and matin g experimental stations, that allows samples to be transferred between prep aration and analysis tools with high positional accuracy. The sample holder s are designed to be manipulated/transported using standard "ESCA stub" com patible hardware. Provisions are made for heating, cooling, and temperature measurement. (C) 2000 American Vacuum Society. [S0734-2101(00)08805-9].