Kinetic Monte Carlo simulations: an accurate bridge between ab initio calculations and standard process experimental data

Citation
M. Jaraiz et al., Kinetic Monte Carlo simulations: an accurate bridge between ab initio calculations and standard process experimental data, MAT SC S PR, 3(1-2), 2000, pp. 59-63
Citations number
11
Categorie Soggetti
Apllied Physucs/Condensed Matter/Materiales Science","Material Science & Engineering
Journal title
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
ISSN journal
13698001 → ACNP
Volume
3
Issue
1-2
Year of publication
2000
Pages
59 - 63
Database
ISI
SICI code
1369-8001(200003)3:1-2<59:KMCSAA>2.0.ZU;2-F
Abstract
Kinetic Monte Carlo (KMC) atomistic process simulations mimic the jumps and interactions of individual atoms, based on jump rates derived from ab init io calculations or experiments. By only following 'defect' atoms (unlike mo lecular dynamics), KMC can simulate the typical long annealing times (secon ds to hours) used in materials processing. Thus, it provides a detailed and accurate link between parameters obtained from ab initio calculations and experiments performed under typical processing conditions. We describe the simulation scheme and discuss some of the unique features of this simulatio n technique with the help of results obtained with it. (C) 2000 Elsevier Sc ience Ltd. All rights reserved.