Correlation of scanning thermal microscopy and near-field cathodoluminescence analyses on a blue GaN light emitting device

A scanning near-field thermal microscope and a scanning electron microscope /scanning near-field optical microscope hybrid system for near-field cathod oluminescence investigations were used to characterize blue GaN LEDs. Optoe lectronic, electronic and thermal device properties are determinable with h ighest resolution. These results provide an interesting perspective with re spect to failure analyses and reliability of the devices. (C) 2000 Elsevier Science Ltd. All rights reserved.