Short noise partial suppression in the SILC regime

The power spectral densities of the current fluctuations through fresh and stressed thin oxide are investigated by means of a purposely designed ultra low noise measurement system. It is reported for the first time that the S ILC noise spectrum exhibits partially suppressed shot noise down to about 7 0% with respect to the full shot noise observed for fresh oxide in Fowler-N ordheim regime. II is shown that a single trap assisted tunneling model wit h a uniform trap distribution in both energy and space is able to justify t he observed noise behavior. (C) 2000 Elsevier Science Ltd. All rights reser ved.