T. Warwick et al., SOFT-X-RAY SPECTROMICROSCOPY DEVELOPMENT FOR MATERIALS SCIENCE AT THEADVANCED LIGHT-SOURCE, Journal of electron spectroscopy and related phenomena, 84(1-3), 1997, pp. 85-98
Several third generation synchrotron radiation facilities are now oper
ational, and the high brightness of these photon sources offers new op
portunities for X-ray microscopy. Well developed synchrotron radiation
spectroscopy techniques are being applied in new instruments capable
of imaging the surface of a material with a spatial resolution smaller
than 1 mu m. There are two aspects to this. One is to further the fie
ld of surface science by exploring the effects of spatial variations a
cross a surface on a scale not previously accessible to X-ray measurem
ents. The other is to open up new analytical techniques in materials s
cience using X-rays on a spatial scale comparable with that of the pro
cesses or devices to be studied. The development of the spectromicrosc
opy program at the Advanced Light Source will employ a variety of inst
ruments, some of which are already operational. Their development and
use will be discussed, and recent results will be presented to illustr
ate their capabilities. (C) 1997 Elsevier Science B.V.