The local changes in oxygen concentration of high T-c superconductor YBa2Cu
3Oy (Y123) were determined through three electron diffraction techniques, w
here y denotes the oxygen fraction in the unit cell. (1) Using the relation
ship between oxygen concentration and lattice parameters, a local change in
y was measured from selected area electron diffraction patterns. The resul
ts show that the oxygen concentration is lower near a grain boundary compar
ed with a central region of the grain in a sintered sample. The relative ac
curacy of y and the spatial resolution in this measurement is +/-1.5% and s
everal hundreds nm, respectively. (2) A local change in y was detected by c
omparing measured zone axis critical voltages with theoretical values. A va
lue of y is lower in the vicinity of Y2BaCuO5 (Y211) particles in a sample
prepared by the quench and melt-growth method. The accuracy of y is +/-0.67
% and the spatial resolution is 20-50 nm. (3) A change in y was also determ
ined by quantitative analysis of rocking curves from convergent-beam electr
on diffraction patterns. The value of y decreases by 3% after electron irra
diation for 300 s at 200 kV. The accuracy of y is +/-0.5% and the spatial r
esolution is several nm when imaging plates were used in an energy-filterin
g transmission electron microscope with a field emission gun. (C) 2000 Else
vier Science B.V. All. rights reserved.