The hardness, elastic modulus, and elastic recovery of nanostructured borid
e/nitride films 1-2 mu m thick have been investigated by the nanoindentatio
n technique under the maximum loads over a wide range (from 5 to 100 mN). I
t is demonstrated that only the hardness parameters remain constant at smal
l loads (5-30 mN). The data obtained are discussed and compared with the pa
rameters determined by other methods. (C) 2000 MAIK "Nauka/Interperiodica".