A compact and transportable infrared multicomponent acquisition (IRMA) syst
em based on infrared absorption spectroscopy has been developed for plasma
diagnostics and control. The IRMA system contains four independent tunable
diode lasers which can be temporally multiplexed and directed into plasma r
eactors or into a multipass cell for exhaust gas detection. Rapid scan soft
ware with real-time line shape analysis provides simultaneous measurements
of the absolute concentrations of several molecular species. (C) 2000 Ameri
can Institute of Physics. [S0034-6748(00)02510-7].